Abstract
Fluorocarbon films were obtained by introducing perfluorobutene-2 into the afterglow region of an argon plasma. The plasma was generated electrodelessly using plates excited at 13.56 MHz at 70 watts of power. Film deposition rates between 250 A and 450 A per minute were obtained during typical operating conditions. The films were light yellow in color, adhered strongly to dry glass substrates, and exhibited liquid contact angles very similar to those reported for poly(tetrafluoroethylene) surfaces. The infrared spectrum of the film was quite similar to that obtained for Teflon. The freshly prepared film contained a high concentration of unpaired spins, and the ESR signal decayed slowly on standing in vacuum. The films could be removed from the glass substrates by immersion in dilute hydrofluoric acid or in brackish water.
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