Abstract
During sensor fabrication, hydrogel thin films of poly(vinylalcohol)/poly(acrylic acid) (PVA/PAA) is exposed to various low pressure plasmas. To conserve the sensing properties of the hydrogel, a precise knowledge of the interaction of the PAA/PVA film with the low-pressure plasmas of the technological cycle is required. In this work, an investigation of the film surface composition, chemical bonding and optical properties of radio-frequency (13.56 MHz) and dual-frequency (13.56 MHz/100 kHz) plasma modified PAA/PVA thin films were carried out. Plasma treatment was performed in a RIE chamber (SF 6, CHF 3) and a PECVD deposition chamber (SiH 4/N 2, NH 3). To investigate the influence of ion bombardment, a dual-frequency configuration comprising two r.f. power supplies operating in a switched mode was used. The results of this work allow optimizing the fabrication of thin film pH-value sensors.
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