Plasma–surface interaction modelling of d.c. reactive magnetron discharges

Abstract

Abstract We present a plasma model that was developed in connection with experimental studies on magnetron discharges working in reactive gases (Ar/O 2 , Ar/N 2 and N 2 /O 2 mixtures, …). This model was designed to include, first, the electron energy deposition in the magnetized region which is studied through the resolution of the Boltzmann equation for electron energy distribution function (eedf) and, second, the production of molecular and atomic excited states of the buffer and reactive gases through a Collisional–Radiative Model. In order to determine the sputtered particle fluxes, positive and negative ion densities are also calculated, and positive ion species fluxes to the cathode are deduced. We include the effect of all surfaces (cathode, substrate and chamber walls) on the consumption of species resulting from the presence of the reactive gas. The present model was applied to the Ar/O 2 mixture.