Abstract
Porous nanostructured TiO 2 Films were deposited by vacuum plasma spraying process using nano-TiO 2 particles as spray powders. The crystal structure of the films were determined with XRD. The morphology and size distribution of TiO 2 particles of the films were characterized by SEM and TEM. It was found that TiO 2 films were a mixture of anatase, rutile and TiO 2-x phases, and their contents were dependent on plasma parameters. The TiO 2 particle size of the films ranged from several to 100nm.
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