Abstract
An AC plasma source produced by using a multi-phase AC voltage source with the frequency of a commercial electric power system is presented. Fundamental characteristics both of a glow discharge and of a plasma generated by the multi-phase source were investigated experimentally. The glow discharge plasma is produced in a large vacuum chamber of diameter 100 cm and length 200 cm in which several (2 - 12) electrodes are arranged in a regular polygon and connected to multi-phase (2 - 12 phases) voltage sources. The discharge regions, namely the plasma production regions, rotate at the frequency of the electric source in the direction with the phase sequence and expand fully into the chamber as the gas pressure decreases. Comparisons of plasma characteristics among multi-phase sources with different total phase numbers were made under the same effective voltage. With the increase in the number of total phases, the overlap duration of discharges between adjacent electrodes is extended and the instantaneous total wasted power of the multi-phase source has a remarkably small ripple ratio. Consequently, a very stable plasma with a small density fluctuation was obtained.
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