Abstract
Using plasma in conjunction with fluorinated compounds is widely encountered in material processing. We discuss several plasma techniques for surface fluorination: deposition of fluorocarbon thin films either by magnetron sputtering of polytetrafluoroethylene targets, or by plasma-assisted chemical vapor deposition using tetrafluoroethane as a precursor, and modification of carbon nanowalls by plasma treatment in a sulphur hexafluoride environment. We showed that conformal fluorinated thin films can be obtained and, according to the initial surface properties, superhydrophobic surfaces can be achieved.
Highlights
Fluorine atoms are the most electronegative atoms and upon combination with carbon can form various compounds with remarkable properties for a broad range of applications, such as the modification of surfaces wettability, waterproof/water repellent textiles, increase durability, and decrease of friction coefficient [1], optical applications [2], changing the electronic states of dielectric multilayer [3], etc.In particular, wettability is an important property of a surface, wetting or non-wetting behavior having an impact on a wide range of scientific and technological fields
Fluorinated Thin Films Obtained by Magnetron Sputtering of PTFE Targets
Spectroscopy (XPS) survey spectra revealed carbon and fluorine as the 3main of 15 elements both for the PTFE target and PTFE-like material, while oxygen and nitrogen are present as contaminants caseofofplasma plasmadeposited depositedmaterial
Summary
Fluorine atoms are the most electronegative atoms and upon combination with carbon can form various compounds with remarkable properties for a broad range of applications, such as the modification of surfaces wettability, waterproof/water repellent textiles, increase durability, and decrease of friction coefficient [1], optical applications [2], changing the electronic states of dielectric multilayer [3], etc. Wettability is an important property of a surface, wetting or non-wetting behavior having an impact on a wide range of scientific and technological fields. The typical characterization of wettability requires contact angle measurements. They indicate, quantitatively, the degree of wetting, from analyzing the shape of a liquid drop placed on the surface. Small contact angles (90◦ ) corresponds to low wettability, which means hydrophobic surface, while a very large contact angle
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