Abstract
AbstractPlasma is a useful tool to synthesize carbon nanomaterials, including diamonds, fullerenes, nanotubes, and graphenes. This review gives an overview of these carbon nanomaterials produced by thermal or nonthermal plasmas and of the authors' work related to plasma‐enhanced chemical vapor deposition of carbon nanotubes, along with an analysis and numerical simulation of CH4/H2 feedstock gas plasmas. The amount of carbon atoms in the grown carbon nanotubes and that calculated by simulation showed good agreement. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(6): 1–8, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.11504
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