Abstract
Hydrocarbon plasma polymer thin films were deposited by means of magnetron sputtering of polyethylene (PE) using Ar as the working gas. AFM, ESCA, FTIR techniques were applied to investigate the films properties and composition. The films sputtered at Radio frequency (RF) power up to 100 W have a plasma polymer structure whereas further increase of RF power results in hydrocarbon plasma polymers more resembling conventional PE.
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