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Abstract
Hexamethyldisiloxane (HMDSO) thin films coated quartz crystal microbalance (QCM) electrodes have been characterized for the detection of volatile organic compounds (VOCs). The sensitive coatings were plasma polymerized in pure vapor of HMDSO at different flow rates. The QCM based sensors responses were found to be linearly correlated with the concentration of VOCs vapor. It was shown that it is possible to tune the chemical affinity of the sensor by changing the HMDSO flow rate. Contact angle measurements, Fourier transform infrared spectroscopy and scanning electron microscopy were used to study surface wettability, chemical composition and surface morphology of the coated QCM electrodes.
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