Plasma particle interactions

Abstract

We present some results from numerical, fluid and particle models of non-thermal low pressure RF discharges contaminated by dust particles. These models have been used (1) to show the effect of the presence of dust particles on the electrical characteristics of an RF discharge, (2) to study the charge and floating potential of dust particles in a low pressure plasma from situations where the particles can be considered isolated to situations where they interact electrostatically and (3) to study the effect of the electrode geometry on the spatial distribution of dust particles in an RF discharge. The results confirm the existence of electrostatic traps close to the plasma-sheath boundary whose shape is very sensitive to the electrode configuration.