Plasma parameters of argon and argon/molecular gas mixture plasmas produced in microwave discharge

Abstract

Abstract The experimental results and their analysis are presented concerning electron density and temperature of the microwave discharge plasma (power range 100–500 W) produced in Ar gas and Ar–N 2 and Ar–N 2 –NO gas mixture at the total pressure of 0.5 Torr. The triple probe method was primarily used in order to set-up a direct and on-time technique to measure electron temperature in complex plasma. The results were compared with those obtained using a cylindrical probe mounted in a circuit with reference electrode. Each probe was made of tungsten wires of 0.5 mm diameter and 3 mm in length each. When plasma contains only one maxwellian group of electrons, within the experimental errors, both the probes systems get comparable value of plasma parameters. When the characteristic of cylindrical probe shows two groups of thermal electrons within the microwave plasma the triple probe may show always results concerning one group but of which temperature depends on the ratio of the densities of those two groups of electrons.