Abstract
The electron energy distribution function (EEDF) and plasma parameters in a planar dc magnetron sputtering discharge in argon and krypton were determined using a Langmuir probe. Two groups of electrons are observed in the discharge. The electron temperature of the cold electrons is roughly independent of the discharge pressure, while the electron temperature of the hot electrons decreases with increased discharge pressure. The electron density increases with increased pressure and is roughly a factor of 2–3 higher for a krypton discharge than for an argon discharge.
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