Abstract

We deposited protective coatings on polycarbonates from hexamethyldisiloxane (HMDSO) and HMDSO/O 2 mixtures by the plasma enhanced CVD method. In particular, we studied deposition rate, optical constants in UV/VIS, film composition and mechanical properties dependent on rf power and oxygen to HMDSO flow rate ratio. Plasma polymer HMDSO films (PP-HMDSO) showed good transparency in the visible and increased absorption in UV region. The optical constants of HMDSO/O 2 films were similar to the tabulated SiO 2. In general, the films were characterised by a relatively high content of hydrogen (22–66%) and a carbon content below 20%. The films deposited at an oxygen-to-HMDSO flow rate ratio higher than 15 exhibited higher tensile stress and higher hardness than those prepared at ratios of 5–10. The nature of the internal stress changed to compressive for PP-HMDSO. Plasma pre-treatment of polycarbonate in argon significantly improved the film adherence, especially when low powers and short treatment times were used.

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