Abstract
Hard carbon thin films have been investigated intensively in the past decade. They show properties of extreme hardness, chemical inertness and optical transparency and their use has been suggested for wear protective coatings. This paper describes the deposition of such films by PECVD and details the effects of the most important deposition parameters on their mechanical properties. Films were produced which exhibited extreme hardness of up to 3000 Vickers. Their deposition rate was found to decrease with substrate temperature and increase with bias and pressure. The intrinsic stress and wear resistance were found to increase with the induced bias and substrate temperature but decreased as the pressure was increased. The film adhesion was found to improve at higher temperature and bias also at higher pressure but films in this region were found to be of reduced hardness. The deposition conditions which must be maintained in any scaling-up of the system to commercial size were identified.
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