Abstract
Abstract Specimen contamination and amorphous irradiation damage severely limit the ability to perform accurate electron microscope analysis of materials, especially as specimen areas of interest decrease in size. To analyze smaller areas of interest, electron probe sizes have decreased, while probe currents have increased. The combination of these two factors results in an increase in the amount of carbonaceous contamination formed on the specimen under the electron beam. Recently, the use of low energy plasmas has been shown to be effective in preventing such contamination from occurring (1-3). For TEM, the simultaneous placement of the specimen holder and specimen into such a plasma for short periods of time (usually less than two minutes) results in the ability to hold a converged probe on the specimen for analysis without contamination becoming an problem. Figure 1 is a TEM micrograph of a 304 stainless steel specimen.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
