Abstract
The preparation of fine MoSi2 and MoSi<sub>2</sub> - Si<sub>3</sub>N<sub>4</sub> composite powders with specific surface area of 16-33 and 30-41 m<sup>2</sup>/g respectively by evaporation of Si and Mo raw powder mixtures or coarse grained MoSi<sub>2</sub> in radio frequency inductively coupled nitrogen plasma flow was investigated. Specific surface area of obtained powders as well as content of MoSi<sub>2</sub> modifications, Si<sub>3</sub>N<sub>4</sub> and extra phases Mo<sub>5</sub>Si<sub>3</sub>, Si depend on the raw powder feeding rate, the cooling gas flow rate and the composition of raw mixtures. The shape of the product particles was spherical for MoSi<sub>2</sub> and both spherical and whiskers for composites.
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