Abstract
AbstractTwo applications of plasma effects in fabrication of LEDs are introduced. One is scribing LED wafer by mechanical impacts of plasma, which is induced by laser ablation, to the bottom of LED wafer. The other one is the surface plasmon effect on light emission. Ag nano‐particles are formed on about 50‐nm thick p‐GaN epitaxial layer over multi‐quantum wells (MQWs) and an additional 150‐nm thick p‐GaN layer is grown again over the surface. As the result, the Ag nano‐particles are located within the overall p‐GaN epitaxial layer, very near to MQWs. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Published Version
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