Abstract

AbstractWe have studied the growth of GaN layers by plasma‐assisted electroepitaxy (PAEE). We have used an RF‐plasma source to produce high concentrations of N species in the Ga melt and a high DC electric current to transfer the N species from the Ga surface to the growth interface. We have achieved continuous GaN layers by PAEE at growth temperatures as low as ∼650oC. We have also investigated PAEE growth of GaN layers on GaN nanocolumn templates. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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