Abstract
The plasma wave (carrier-density wave) and thermal wave in an optically opaque semiconducting cantilever (3D geometry), photogenerated by a tightly focused and intensity-modulated laser beam, were analyzed. The theoretical model for the carrier-density and temperature distribution by using the Green function method and Hankel transformation was given. The amplitude and phase of the carrier-density and temperature space and frequency distribution in the cantilever are calculated, including the thermalization and surface and volume recombination heat processes. These investigations are important for many practical experimental situation (atomic force microscopy, thermal microscopy, thermoelastic microscopy, etc) and sensors and actuators based on cantilevers.
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