Abstract
Abstract This article presents the design and fabrication of an electrostatic lens unit for the focusing of an electrospray beam. In our design, the post fabrication assembly is eliminated when silicon electrodes and glass spacers are permanently bonded using plasma activated wafer bonding. Minimizing fabrication errors and electrodes misalignment are essential in order to minimize geometrical aberration sources such as astigmatism. Our fabrication process allows etching each electrode in a separate step and eliminates aperture size mismatch. The glass standoffs in the lens unit provide a breakdown voltage of up to 22kV for focusing in vacuum.
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