Abstract
An electromechanical actuator based on a P(VDF-TrFE-CFE) / BaTiO3 terpolymer nanocomposite of high field-induced strain was used in a variable focal length micro-lens design. The liquid-filled micro-lens consisted of a fluidic chamber, structured on a silicon wafer and sealed by an elastomeric lens membrane with a round-shaped nanocomposite actuator attached to it. A fabrication process was developed taking into account also particular characteristics of the actuator material for thin film parameter optimization. A change in the focal length of the fabricated micro-lens with a nanocomposite actuator was successfully demonstrated. Specifically, a 3 mm aperture, plano-convex variable focal length micro-lens of optical power ranging from 21 dpt to 13 dpt was obtained by varying the electric field applied on the nanocomposite actuator.
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