Abstract
The digital holographic microscope (DHM) has emerged as a useful tool for verifying the three-dimensional structure of an object. A dual-type inline DHM that can be used with both transmission and reflection imaging in a single device is developed. The proper modes (between transmission and reflection imaging) can be easily changed according to the characteristics of the object in this system. The optimum condition for retrieving the correct phase information is illuminating a plane wave to an object. In contrast to the transmission imaging, it is difficult to illuminate an object using a plane wave without deformations in the reflection imaging. We developed an adequate relay lens module for illumination that can be adapted to any type of microscope objective without significant aberrations in the reflection imaging. The relationship between the illuminating condition and the measured phase based on the wave optics is analyzed. A specially designed and manufactured phase mask is observed in this system, and an alternative method for overcoming the limitation of phase unwrapping is introduced for the inspection of that object.
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