Abstract
This study presents a technological capability of producing individual size-defined luminescent centers and high-density arrays of upconversion particles using monosize powder based on NaYF4 matrix doped with rare earth metals such as erbium and ytterbium. The integration of various techniques such as lithography, etching, and deposition has enabled the creation of cavity arrays, or trenches, with arbitrary shapes for localization of luminescent monodisperse microparticles with an average size of 1.65 μm.
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