Abstract

The aim of this paper is to demonstrate, for the first time, the possible existence of planar point defect silicon self-interstitials in the ${311}$ plane. The results offer a plausible explanation as to why self-interstitials aggregate to form ${311}$ defect clusters during ion implantation. These interstitials do not leave any dangling bonds and can be considered to be ``extended,'' due to spread out perturbations.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call