Abstract
Planar optical waveguides in Nd:BSO crystals were fabricated by the implantation of 500keV He ions and 6.0MeV C ions at two different substrate temperatures. The guiding modes were measured by the prism-coupling method with a He–Ne beam at 633nm. The intensity calculation method (ICM) and reflectivity calculation method (RCM) were used for reconstructing refractive index profiles. The near-field intensity distribution of the waveguide, formed by He and C ions implanted after annealing at 300°C, was measured by the end-face coupling setup. It was in reasonable agreement with the intensity of the waveguide mode simulated by the finite-difference beam propagation method (FD-BPM). The absorption spectra of the sample with He ions implanted at fluences of 3×1016ions/cm2 were measured using a spectrophotometer.
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