Abstract
Planar evanescent wave chemical and biochemical sensors are multi-layer systems consisting of a waveguide layer deposited on an optical substrate and coated by a sensor layer. The evanescent field of the wave propagating in the waveguide layer penetrates the sensitive film. In biochemical sensors, the role of a sensitive film can be taken up by the liquid covering the waveguide. The change of refractive index of the cover or the change of sensitive film thickness results in the change of effective indexes of the guided modes [1]. These changes can be measured in interferometer systems or with the use of grating couplers. The paper presents planar waveguide sensor structures with input grating couplers to be applied in evanescent field spectroscopy. The results of theoretical investigations and of experimental research have been presented. Detection thresholds involving the changes of refractive index and the changes of sensor layer thickness have been provided.
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