Abstract
We have explored the operation and characteristics of a planar magnetron discharge system with central on-axis electron injection and a reflector electrode. The diameter of the magnetron copper target was 125 mm; the operating gas was argon and the pressure range 2 × 10−4 – 2 × 10−3 Torr. To increase the efficiency of electron injection, a negatively-biased reflecting electrode was located on the system axis. We have investigated the effect of the reflector electrode on the characteristics of the magnetron discharge, as a function of reflector shape, cross-sectional area, electrical bias, and distance from the target. It is shown that the simultaneous use of central injection of electrons with their acceleration across the cathode layer of the magnetron discharge, and a cone-shaped reflector electrode allows the current to be increased and the operating pressure to be decreased by a factor of several for a fixed magnetron discharge voltage.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
