Abstract
Planar quadrantal arrays of GHz response HgCdTe photodiodes for application in CO 2 laser radar have been fabricated using ZnS as a diffusion mask for an indium-mercury diffusion. Quantum efficiencies over 50% have been obtained with a uniformity within the array of better than ± 3%. Electrical isolation between array elements was better than 35 dB out to 1.5 GHz, yet negligible optical dead space was found between the photodiodes.
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