Abstract

The planar Hall effect is theoretically and experimentally studied in the vertical Hall sensor (VHS). Compared to silicon plate-shaped devices where experimental and theoretical value correspond well, the experimental value for the vertical Hall device is about 10 times smaller than theory predicts. This fact is explained by anisotropy effects and by the unique self-compensating structure of the device. Thus, magnetic field transducers built with devices of this structure are particularly adapted to the measurement of magnetic fields with more than one component.

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