Abstract

In this work, a novel multispectral sensing system consisting of nanostructured filter matrix and a charge-coupled device (CCD)-based image sensor has been developed to overcome the limitation of the conventional pigment filtered sensors, which are difficult to be fabricated at a microscale and usually showing a pronounced degradation. By designing the filters in guided-mode resonance (GMR) architecture, light transmission efficiencies of ~90% with low sidebands and sharp peaks can be obtained, which are critical characteristics for realizing precise optical measurement systems. To optimize the transmission functions, various materials and structural parameters have been simulated. Electron beam nanolithography is employed in the device fabrication to fabricate pixel-wise independent filter functions. After being characterized in terms of their wavelength filtering capability, the developed GMR filters are then combined with image sensors, particularly for addressing biological applications.

Highlights

  • Due to the world population explosion and rapid increase of healthcare costs, real-time health monitoring is more and more important and has drawn much attention in both scientific community and industry

  • Our measurement system works by shining a broadband light through our body part and simultaneously detecting the transmitted light with an image sensor covered by color filter matrix

  • Silicon nitride (Si3N4) was chosen as waveguide layer, while the buffer layer was made of silicon dioxide (SiO2)

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Summary

Introduction

Due to the world population explosion and rapid increase of healthcare costs, real-time health monitoring is more and more important and has drawn much attention in both scientific community and industry. To address this demand, light, which can be tailored as a very powerful tool can be used in biomedical applications [1]. Up to now, most of the presently available sensors are too complex and expensive or measure only an insufficient number of health indicators. Optical spectral analysis can be applied in sensing systems for measuring various body parameters and health indicators. One possible realization is to cover pixels of a CCD image sensor by designed color filters, which can be controlled from pixel to pixel in terms of their filtering functions (Figure 1), to obtain a compact portable health monitoring spectrometer

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