Abstract
A micropolarizer array (MPA) that can be integrated into a scientific camera is proposed as a real-time polarimeter that is capable of extracting the polarization parameters. The MPA is based on highly aligned carbon nanotube (CNT) films inspired by their typical anisotropy and selectivity for light propagation over a wide spectral range. The MPA contains a dual-tier CNT pixel plane with 0° and 45° orientations. The thickness of the dual-tier structure of the CNT-based MPA is limited to less than 2 μm with a pixel size of 7.45 μm × 7.45 μm. The degree of polarization of the CNT-MPA reached 93% at a 632 nm wavelength. The specific designs in structure and semiconductor fabrication procedures are described. Compared with customary MPAs, CNT-based MPA holds great potential in decreasing the cross-talk risk associated with lower film thickness and can be extended to a wide spectral range.
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