Abstract
The key technology of particulate contamination control in cleanrooms (CR)s is to detect airborne particles and to trace their sources. In this study, PIXE (Particle Induced X-ray Emission) method was applied to elemental analysis of particles in the actual CR for manufacturing gate valves (JIS class 8). Furthermore, principal component analysis, which was one of receptor models, have extracted three main components on their sources (soil, oil combution and gate-valve fabrication) from the hourly data gained by the PIXE method. We have confirmed that the technique combining the receptor model with the PIXE method was valid for the evaluation of particulate contamination in the CR environments.
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