Abstract
A fast-reading Pirani manometer with an electronically linearized response for gas pressures between 3×10−4 and 0.5 Torr is described. The time constant of the manometer is 20 msec. Two NTC resistors are used, one for the sensor in the vacuum system and one for the reference at constant pressure. The pressure in the vacuum system is measured by analog computation of the power needed to stabilize the two resistors to equal temperature. By a relatively simple compensation circuit, changes in room temperature within ±10 °C can be eliminated to less than 1 per mille per degree. The manometer is built from inexpensive standard electronic components.
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