Abstract
TMAH is quaternary ammonium salt, consists of a methylated nitrogen molecule, and is widely used in the electronics industry as a developer and silicon etching agent. This substance is toxic and fatal if ingested. It can also cause skin burns, eye damage, and organ damage. Moreover, TMAH exhibits long-lasting toxicity to aquatic systems. Despite this known toxicity, the authorities currently do not provide emission limits (i.e., discharge concentrations) for wastewater by EU regulation. The current scenario necessitates the study of the processes for industrial wastewater containing TMAH. This work aims to present a successful example of the treatment process for the degradation of TMAH waste solutions of the E&S industry. Research was conducted at the pilot scale, and the process feasibility (both technical and economic) and its environmental sustainability are demonstrated. This process, which treats three exhausted solutions with a high concentration of toxic substances, is considered to be innovative.
Highlights
The microelectronic industry produces a series of devices as memory and highperformance chips
tetramethylammonium hydroxide (TMAH) is classified in the “Substances which have an unfavorable influence on the oxygen balance” and “Substances which contribute to eutrophication
The E&S industry produces a large amount of toxic wastewater, and TMAH is among the most dangerous pollutants
Summary
The microelectronic industry produces a series of devices as memory and highperformance chips. These devices are produced on silicon wafers, which are integrated circuits for special applications, such as LEDs/OLEDs [1,2,3,4]. Different production processes involve the consumption of several chemicals, some of which are toxic and/or highly flammable. The main substances contained in the residual effluents are organic ones, such as acetic acid, tetramethylammonium hydroxide (TMAH), and mineral acids, including nitric and hydrofluoric acid. All these compounds are hazardous materials and, with the exception of TMAH, can be removed by traditional processes [5]. TMAH is classified as ecotoxic, according to the ECHA [6]: “Hazardous to the aquatic life with ling lasting effects (H411)
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