PIGE analysis and profiling of aluminium

Abstract

In this work we present an alternative method for PIGE analysis of aluminium in thick samples. This method is based on the ERYA – emitted radiation yield analysis – code, which integrates the nuclear reaction excitation function along the depth of the sample. For this purpose, the excitations functions of the 27Al(p,p′γ1,2)27Al reaction (with gamma-ray energies of 844 and 1014keV) were employed. Calculated gamma-ray yields were compared, at several proton energy values, with experimental yields for thick samples made of inorganic compounds containing aluminium. The agreement is better than 5%.The 1684keV resonance of the same reaction, with a natural width of 100eV, was used to profile samples of Ti implanted with several doses of Al. We show that this resonance, stronger than the 992keV resonance of the 27Al(p,γ)28Si usually employed for aluminium profiling, leads to similar depth resolution in shorter collection time.