Abstract
PIGプラズマCVD法によるダイヤモンドライクカーボン薄膜の作製
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https://doi.org/10.3131/jvsj2.60.85
Journal: SHINKU | Publication Date: Jan 1, 2017 |
Citations: 1 | License type: free |
PIGプラズマCVD法によるダイヤモンドライクカーボン薄膜の作製
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