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Abstract
A low stiffness silicon V-AFM cantilever with integrated piezoresistive sensors on its root is applied to an atomic force microscope (AFM) for high-speed piezoresistive imaging. The images are presented from a sample with 1.0 μm high microfeatures in constant-height (variable force) mode with a tip scan rate of 1000 μm/s. The experiment is performed in a DC Wheatstone bridge arrangement with a 3.0 V battery supply. Electrical hum pickup, 1/f noise, and magnetic effect affecting the image will be discussed.
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