Piezoresistive Silicon Microresonator for Measurements of Hydrogen Adsorption in Carbon Nanotubes

Abstract

In this paper, the mass detection of hydrogen adsorption using a piezoresistive resonant silicon microresonator is presented. The working principle relies on the resonant frequency shifts of the cantilevered resonator with a sample due to hydrogen adsorption. The mass of adsorbed hydrogen in carbon nanotubes (CNTs) grown on the resonator is measured experimentally after exposing to high pressure hydrogen. The mass of CNTs on the resonator is measured from resonant frequency change after the removal. According to masses of the adsorbed hydrogen and CNTs, we obtain the adsorption capacity of hydrogen into CNTs.