Abstract
The fabrication and experimental characterization of a microinjection molded piezoresistive polymer accelerometer is presented here. The simplicity and low-cost of the fabrication process are a major advantage of the proposed alternative for the fabrication of microaccelerometers. Also, the compatibility with injection molded technologies enables direct integration of the devices into complex structures.Accelerometers have been fabricated using thermoplastic material (POM). The main structure of the accelerometer consists of a proof mass connected to an external structure by four arms. At the end of each arm, a pizoresisistive material is used for transduction. A Wheatstone bridge and an amplifier are used to measure the accelerometer output. Fabricated devices show a sensitivity of 56mV/g, a resonance frequency of 270Hz and a dynamic range of ±37g.
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