Abstract
A high sensitive miniature piezoresistive force sensor utilizing combination of three-axis stress components has been developed. This work aims to develop a force sensor which acts as a sensing unit assembled in a new miniature high pressure sensor. By using a force transmission rod, forces are applied to piezoresistors on a Si diaphragm of the sensor. Resistance changes of the piezoresistors depend on combination of stress components generated by the applying forces. FEM stress analysis was carried out, in order to investigate dependence of stress components on dimensions and Young's modulus of the rod, and diaphragm thickness. A sensor structure to obtain large resistance changes of the piezoresistors was found by utilizing valid combination of three-axis stress components according to the analysis. As an experimental result, an output voltage more than 140mV/5V at 150N was obtained.
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