Piezoelectric time delayed control for nonlinear vibration of nanobeams

Canchang Liu,Qingmei Gong,Yingchao Zhou,Changcheng Zhou

doi:10.1177/1461348420925579

Abstract

The nonlinear vibration effect of nanobeam and problem of the pull-in between the nanobeam and driven plate are the factors which prevent nano-resonator from improving the performance. The nonlinear governing differential equation is built by considering the axial force with piezoelectric controller. The piezoelectric time-delay electrostatic pull-in control is studied and the first-order approximate solution of nonlinear equation is gotten by using the method of multi-scale. The amplitude–frequency and phase frequency response equation of nonlinear vibration system are given for the primary resonance response of the nanobeam. The relationship between the control effect and feedback control parameters is studied. It is found that the piezoelectric time-delay control can change the critical voltage but not the critical position. The axial force can affect the performance of nanobeam.

Highlights

With the rapid development of electronic technology, the fabrication of resonators with high fundamental frequency and high quality factor has become a very active research field for more than 10 years
The applications of high frequency circuits and clock signal circuit of new generation high performance computer have put forward the new requirements for the performance of resonators
Nano structure acted as the core components of the high-frequency resonator,[1,2,3,4] its performance is affected by the pull-in effect and nonlinear vibration, which exists between nanobeam structure and drive plate

Summary

Introduction

With the rapid development of electronic technology, the fabrication of resonators with high fundamental frequency and high quality factor has become a very active research field for more than 10 years. Nano structure acted as the core components of the high-frequency resonator,[1,2,3,4] its performance is affected by the pull-in effect and nonlinear vibration, which exists between nanobeam structure and drive plate. It urgently needs a kind of control method to meet the needs of the resonator of nanobeam vibration. It is difficult to control the vibration of nanobeam

Objectives

Conclusion