Abstract
Summary form only given. A new dual-stage actuator for positioning a magnetic head for high-density hard disk drives (HDDs) was proposed and developed. This dual-stage actuator device is characterized by the sputter-deposited thin film PZT, featuring large displacement of 1.2 microns and high resonance frequency over 15 kHz. In this work, reliability against temperature, humidity, heat cycle, and mechanical shock was investigated to ensure the practical application to the drive products.
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