Abstract
In this work, the resonant frequency of cantilevers actuated using a piezoelectric ceramic disk is measured by optical means. Groups of amorphous hydrogenated silicon carbide (a SiC:H) microcantilevers, that are fabricated by bulk micromachining of a silicon substrate, are used to extract the Young's modulus on different locations of the sample, which allows us to a map this mechanical property along the entire surface of the film. The determination of the Young's modulus of a-SiC:H is essential for the design and development of MEMS using this material. Specially because this material has low residual and gradient stresses, 70 MPa (compressive) and 36 MPa/μm, respectively, and its modulus of elasticity was determined to be 91 GPa, with small variation. The modulus of sputtered chromium was also measured (285 GPa).
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