Abstract

A new piezoelectric rotary mechanism for precise positioning was proposed. It was designed in asymmetrically configuration of two sets of cantilever bimorphs with end-mass. And the frictional force between the revolving shaft and axle housing can be adjusted within potential range. The rotary actuator can run silently and smoothly on sine wave electric voltage. The dynamic characteristics have been tested on assembled prototype. The rotary actuator is desired to used in micromachining or micro-assembly etc.

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