Abstract
Barium titanate (BaTiO3) is a ferroelectric and piezoelectric material with excellent components. Barium titanate film success fully made with various concentration of CeO2 0%, 2%, 4%, and 6% through Chemical Solution Deposition (CSD) method in annealed process at 550 °C for 23.5 hours and the spin coating technique with a speed of 8000 rpm. The results of the crystal properties test showed that the lattice parameters with various concentration of CeO2 0%, 2%, 4%, 6% respectively a = b = 4.0491 Å and c = 4.0258 Å; a = b = 4.06267 Å and c = 4.0355 Å; a = b = 4.0549 Å and c = 4.0249 Å; a = b = 4.0547 Å and c = 4.0385 Å so that the crystal structure is tetragonal. The results of the optical properties test that the index refractive resulted in 1.4842, 1.4508, 1.4917, and 1.5175. The piezoelectric response test gets results of the piezoelectric voltage constant in the range 33.3322–43.1052 Vm/N, piezoelectric charge constants in the range 1.4700 × 10−7–1.9074 × 10−7 C/N and mechanical strain in the range 166.0147 to 329.1333. Based on characterization results and tested, cerium oxide doped barium titanate film have potential to develop being piezoelectric sensor.
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