Abstract
The bulk acoustic wave filters at GHz bands were fabricated using lead titanate, PbTiO3 (PT) piezoelectric films which were deposited by RF magnetron sputtering and were oriented along <111> crystal direction. To improve the quality of PT films, the bottom electrodes which had the Ti-diffusion suppressible layers were designed and prepared. X-ray diffraction intensity of the PT(111) became 5 times larger and degree of crystal orientation became 2 times stronger in comparison with those of the former PT films. The filters using the improved PT films had the insertion loss of -14dB. The PT film had effective electromechanical coupling coefficient (k) of 31% and electrical Q of 50. This k value was superior to those of well-known ZnO and AlN piezoelectric films.
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