Abstract
A series of lanthanum and calcium modified PbTiO3 [(Pb1−x−yLaxCay)Ti1−x/4O3] thin films deposited on (111)Pt/Ti/SiO2/Si substrate were successfully achieved using a sol–gel route. It was found that all the (Pb1−x−yLaxCay)Ti1−x/4O3 films exhibited high (100)-orientation, and the La and Ca contents played a significant role in their electric properties. The dielectric loss, fatigue and leakage current characteristics of films became worse with increasing Ca content, and the (Pb1−x−yLaxCay)Ti1−x/4O3 film (x=0.1,y=0.1) possessed excellent piezoelectric and ferroelectric properties with maximum piezoelectric constant (d33∼132pm/v) and maximum remanent polarization (Pr∼29μC/cm2). These results indicate that the highly oriented (Pb1−x−yLaxCay)Ti1−x/4O3 film with appropriate content of La and Ca doped is a promising candidate for the mechatronics and MEMS applications.
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