Abstract

Piezoelectric motors are used in many industrial and commercial applications. Various piezoelectric motors are available in the market. All of the piezoelectric motors use the inverse piezoelectric effect, where microscopically small oscillatory motions are converted into continuous or stepping rotary or linear motions. Methods of obtaining long moving distance have various drive and functional principles that make these motors categorized into three groups: resonance-drive (piezoelectric ultrasonic motors), inertia-drive, and piezo-walk-drive. In this review, a comprehensive summary of piezoelectric motors, with their classification from initial idea to recent progress, is presented. This review also includes some of the industrial and commercial applications of piezoelectric motors that are presently available in the market as actuators.

Highlights

  • Generation of electrical charge on certain materials in response to applied mechanical stress is known as the piezoelectric effect

  • By the different drive and functional principles for generating unlimited rotary or linear movement, piezoelectric motors can be classified into three categories: (1) resonance drive (Ultrasonic motor), where vibration at ultrasonic frequency range on an oscillating element is transferred to a moving element through frictional coupling; (2) inertia-drives, where a movement is generated by speed dependent friction coefficient; and (3) piezo-walk-drives, where various piezo actuators are used for alternatively clamping and shifting a moving element

  • These motors can be made non-magnetic and magnetic-insensitive, Piezoelectric motors can be made using non-magnetic materials and piezoelectric elements do which is an advantage in medical applications, such as for magnetic resonance tomography (MRT)

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Summary

Introduction

Generation of electrical charge on certain materials in response to applied mechanical stress is known as the piezoelectric effect. By the different drive and functional principles for generating unlimited rotary or linear movement, piezoelectric motors can be classified into three categories: (1) resonance drive (Ultrasonic motor), where vibration at ultrasonic frequency range on an oscillating element is transferred to a moving element through frictional coupling; (2) inertia-drives, where a movement is generated by speed dependent friction coefficient; and (3) piezo-walk-drives, where various piezo actuators are used for alternatively clamping and shifting a moving element. The actuators in these motors operate in a quasi-static mode

Early Structures of Piezoelectric Motors
Piezoelectric motorproposed proposedby by Williams
Early structure unidirectional piezoelectric motors proposed by Wischnewskiy
Resonance-Drive
Piezoelectric Element Is Fully Driven
Piezoelectric Element Is Partially Driven
Multi-Mode Excitation-Type Motors
Multiple
11. First commercialized ultrasonic motor proposed proposed by Sashida
13. Ultrasonic
Inertia-Drive-Type Piezoelectric Motors
Piezo-Walk-Drive-Type Piezoelectric Motors
Discussions
Conclusions
Full Text
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