Piezoelectric micropump with three valves working peristaltically

Abstract

A silicon micropump, provided with piezoelectric valves, which can be manufactured by established integrated circuit techniques is the subject of this report. The micropump can be used to pump liquids or gases to a higher pressure, which can be relieved through a check valve. The body of the pump and the valves are made in silicon and contain piezoelectric material which allows opening and closing of the valves electrically.