Abstract
A dual-frequency micropump is proposed and investigated to improve the performance of a piezoelectric micropump for specific application. Through a careful design, the first bending resonant frequency of the vibrator for pumping is one-third of the third bending resonant frequency. When a square wave voltage is used to drive the vibrator, its first and third bending vibration modes are excited. Experimental results show that the maximum flow rate of 163.7ml/min and a maximum back pressure of 29.7kPa are obtained when the micropump is driven with a square-wave voltage of 400Vp-p at 445.5Hz. Both results are over 155% of those obtained from the single-frequency drive at the same driving voltage swing.
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